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Characterization of rapid thermal processing oxynitrides by SIMS and XPS analyses

Bersani, M. / Vanzetti, L. / Sbetti, M. / Anderle, M.

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Characterization of rapid thermal processing oxynitrides by SIMS and XPS analyses

Bersani, M. / Vanzetti, L. / Sbetti, M. / Anderle, M.

Characterization of rapid thermal processing oxynitrides by SIMS and XPS analyses

Bersani, M. / Vanzetti, L. / Sbetti, M. / Anderle, M.

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Document information

Title:

Characterization of rapid thermal processing oxynitrides by SIMS and XPS analyses

Contributors:

Bersani, M. (author) / Vanzetti, L. (author) / Sbetti, M. (author) / Anderle, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 144 ; 301-305

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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