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    Range evaluation in SIMS depth profiles of Er-implantations in silicon

    New search for: Mayerhofer, K.
    New search for: Foisner, H.
    New search for: Piplits, K.
    New search for: Hobler, G.
    New search for: Palmetshofer, L.
    New search for: Hutter, H.

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    Range evaluation in SIMS depth profiles of Er-implantations in silicon

    New search for: Mayerhofer, K.
    New search for: Foisner, H.
    New search for: Piplits, K.
    New search for: Hobler, G.
    New search for: Palmetshofer, L.
    New search for: Hutter, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Range evaluation in SIMS depth profiles of Er-implantations in silicon

    New search for: Mayerhofer, K.
    New search for: Foisner, H.
    New search for: Piplits, K.
    New search for: Hobler, G.
    New search for: Palmetshofer, L.
    New search for: Hutter, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Range evaluation in SIMS depth profiles of Er-implantations in silicon

    Contributors:

    Mayerhofer, K. (author) / Foisner, H. (author) / Piplits, K. (author) / Hobler, G. (author) / Palmetshofer, L. (author) / Hutter, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 252 ; 271-277

    Publication date:

    2005-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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