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Formation of Porous Structures on Si Surface by Laser-Assisted Etching

Zheng, H. Y. / Chai, J. C. / Lam, Y. C. / Zhu, H.

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Formation of Porous Structures on Si Surface by Laser-Assisted Etching

Zheng, H. Y. / Chai, J. C. / Lam, Y. C. / Zhu, H.

Formation of Porous Structures on Si Surface by Laser-Assisted Etching

Zheng, H. Y. / Chai, J. C. / Lam, Y. C. / Zhu, H.

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Check availability in my library

Order at Subito €

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Document information

Title:

Formation of Porous Structures on Si Surface by Laser-Assisted Etching

Contributors:

Zheng, H. Y. (author) / Chai, J. C. (author) / Lam, Y. C. (author) / Zhu, H. (author)

Published in:

SURFACE REVIEW AND LETTERS ; 12 ; 351-354

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0218-625X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530.417

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