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Smoothing of rough a-Si:H surfaces by ion-assisted deposition and sputter erosion
Smoothing of rough a-Si:H surfaces by ion-assisted deposition and sputter erosion
Smoothing of rough a-Si:H surfaces by ion-assisted deposition and sputter erosion
Dalakos, G. T. (author) / Plawsky, J. L. (author) / Persans, P. D. (author)
MATERIALS LETTERS ; 60 ; 15-18
2006-01-01
4 pages
Article (Journal)
English
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