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The Physics of the Sputter Erosion Process

Urbassek, Herbert M.

When an energetic atom or ion hits a solid surface, atoms, molecules and clusters may be ejected as a consequence of the energy and momentum deposited in the solid. This phenomenon is known as sputtering and has been first described in 1853, when a glow discharge cathode was pulverized.¹ Sputtering constitutes a process that is of considerable importance in the field of glow discharges, plasma treatment of materials, and plasma deposition techniques, cf. elsewhere in these proceedings.²

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The Physics of the Sputter Erosion Process

Urbassek, Herbert M.

When an energetic atom or ion hits a solid surface, atoms, molecules and clusters may be ejected as a consequence of the energy and momentum deposited in the solid. This phenomenon is known as sputtering and has been first described in 1853, when a glow discharge cathode was pulverized.¹ Sputtering constitutes a process that is of considerable importance in the field of glow discharges, plasma treatment of materials, and plasma deposition techniques, cf. elsewhere in these proceedings.²

The Physics of the Sputter Erosion Process

Urbassek, Herbert M.

When an energetic atom or ion hits a solid surface, atoms, molecules and clusters may be ejected as a consequence of the energy and momentum deposited in the solid. This phenomenon is known as sputtering and has been first described in 1853, when a glow discharge cathode was pulverized.¹ Sputtering constitutes a process that is of considerable importance in the field of glow discharges, plasma treatment of materials, and plasma deposition techniques, cf. elsewhere in these proceedings.²

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Title:

The Physics of the Sputter Erosion Process

Contributors:

Auciello, Orlando (editor) / Gras-Marti, Alberto (editor) / Valles-Abarca, Jose Antonia (editor) / Flamm, Daniel L. (editor) / Urbassek, Herbert M. (author)

Published in:

Plasma-Surface Interactions and Processing of Materials ; Chapter: 15 ; 185-199

NATO ASI Series ; 176

Publication date:

1990-01-01

Size:

15 pages

ISBN:

978-94-009-1946-4 , 978-94-010-7369-1

ISSN:

DOI:

https://doi.org/10.1007/978-94-009-1946-4_15

Type of media:

Article/Chapter (Book)

Type of material:

Electronic Resource

Language:

English

Keywords:

Angular Distribution , Particle Flux , Target Atom , Collision Cascade , Surface Binding Energy Chemistry , Industrial Chemistry/Chemical Engineering , Characterization and Evaluation of Materials , Nuclear Physics, Heavy Ions, Hadrons , Physical Chemistry , Chemistry and Materials Science

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