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    Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasma system

    New search for: Hao, J.
    New search for: Xu, T.
    New search for: Liu, W.

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    Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasma system

    New search for: Hao, J.
    New search for: Xu, T.
    New search for: Liu, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasma system

    New search for: Hao, J.
    New search for: Xu, T.
    New search for: Liu, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasma system

    Contributors:

    Hao, J. (author) / Xu, T. (author) / Liu, W. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING A ; 408 ; 297-302

    Publication date:

    2005-01-01

    Size:

    6 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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