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Formation of buried insulating island-like SiO2 layer in silicon

Frantskevich, A. V. / Fedotov, A. K. / Frantskevich, N. V. / Mazanik, A. V. / Rau, E. I. / Kulinkayskas, V. S.

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Formation of buried insulating island-like SiO2 layer in silicon

Frantskevich, A. V. / Fedotov, A. K. / Frantskevich, N. V. / Mazanik, A. V. / Rau, E. I. / Kulinkayskas, V. S.

Formation of buried insulating island-like SiO2 layer in silicon

Frantskevich, A. V. / Fedotov, A. K. / Frantskevich, N. V. / Mazanik, A. V. / Rau, E. I. / Kulinkayskas, V. S.

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Title:

Formation of buried insulating island-like SiO2 layer in silicon

Contributors:

Frantskevich, A. V. (author) / Fedotov, A. K. (author) / Frantskevich, N. V. (author) / Mazanik, A. V. (author) / Rau, E. I. (author) / Kulinkayskas, V. S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 341-344

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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