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Nanomechanical characteristics of SnO2:F thin films deposited by chemical vapor deposition
Nanomechanical characteristics of SnO2:F thin films deposited by chemical vapor deposition
Nanomechanical characteristics of SnO2:F thin films deposited by chemical vapor deposition
Fang, T. H. (author) / Chang, W. J. (author)
APPLIED SURFACE SCIENCE ; 252 ; 1863-1869
2005-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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