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Block Copolymer Lithography: Merging "Bottom-Up" with "Top-Down" Processes

Hawker, C. J. / Russell, T. P.

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Block Copolymer Lithography: Merging "Bottom-Up" with "Top-Down" Processes

Hawker, C. J. / Russell, T. P.

Block Copolymer Lithography: Merging "Bottom-Up" with "Top-Down" Processes

Hawker, C. J. / Russell, T. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Block Copolymer Lithography: Merging "Bottom-Up" with "Top-Down" Processes

Contributors:

Hawker, C. J. (author) / Russell, T. P. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 30 ; 952-966

Publication date:

2005-01-01

Size:

15 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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