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Elimination of surface debris generated by KrF excimer laser ablation of polyimide

Shin, D. S. / Lee, J. H. / Suh, J. / Kim, T. H.

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Elimination of surface debris generated by KrF excimer laser ablation of polyimide

Shin, D. S. / Lee, J. H. / Suh, J. / Kim, T. H.

Elimination of surface debris generated by KrF excimer laser ablation of polyimide

Shin, D. S. / Lee, J. H. / Suh, J. / Kim, T. H.

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Check availability in my library

Order at Subito €

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Document information

Title:

Elimination of surface debris generated by KrF excimer laser ablation of polyimide

Contributors:

Shin, D. S. (author) / Lee, J. H. (author) / Suh, J. (author) / Kim, T. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING A ; 416 ; 205-210

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ihlemann, J. / Wolff-Rottke, B. / Danev, G. et al. | British Library Online Contents | 1995

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Coupland, K. / R. Herman, P. / Gu, B. | British Library Online Contents | 1998

Determination of the debris produced from poly(ethylene terephthalate) during KrF excimer laser ablation

Shin, D. S. / Lee, J. H. / Suh, J. et al. | British Library Online Contents | 2006

Excimer laser structuring of bulk polyimide material

Danev, G. / Spassova, E. / Assa, J. et al. | British Library Online Contents | 2000

KrF excimer laser induced ablation-planarization of GaN surface

Akane, T. / Sugioka, K. / Ogino, H. et al. | British Library Online Contents | 1999