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Structuring of polyimide-metal carbide layer systems by excimer laser ablation

Ihlemann, J. / Wolff-Rottke, B. / Danev, G. / Petkov, K.

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Structuring of polyimide-metal carbide layer systems by excimer laser ablation

Ihlemann, J. / Wolff-Rottke, B. / Danev, G. / Petkov, K.

Structuring of polyimide-metal carbide layer systems by excimer laser ablation

Ihlemann, J. / Wolff-Rottke, B. / Danev, G. / Petkov, K.

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Order at Subito €

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Document information

Title:

Structuring of polyimide-metal carbide layer systems by excimer laser ablation

Contributors:

Ihlemann, J. (author) / Wolff-Rottke, B. (author) / Danev, G. (author) / Petkov, K. (author) / Dieleman, J. / Biermann, U. K. P. / Hess, P.

Published in:

Photon-Assisted Processing of Surfaces and Thin Films ; 245

APPLIED SURFACE SCIENCE ; 86

Publication date:

1995-01-01

Size:

245 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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