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Fabrication of Si nanodot arrays by plasma enhanced CVD using porous alumina templates

Hu, H. / He, D.

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Fabrication of Si nanodot arrays by plasma enhanced CVD using porous alumina templates

Hu, H. / He, D.

Fabrication of Si nanodot arrays by plasma enhanced CVD using porous alumina templates

Hu, H. / He, D.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of Si nanodot arrays by plasma enhanced CVD using porous alumina templates

Contributors:

Hu, H. (author) / He, D. (author)

Published in:

MATERIALS LETTERS ; 60 ; 1019-1022

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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