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Self-Assembled Nanodot Fabrication by Using Diblock Copolymer

Huda, M. / Yin, Y. / Hosaka, S.

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Self-Assembled Nanodot Fabrication by Using Diblock Copolymer

Huda, M. / Yin, Y. / Hosaka, S.

Self-Assembled Nanodot Fabrication by Using Diblock Copolymer

Huda, M. / Yin, Y. / Hosaka, S.

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Check availability in my library

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Document information

Title:

Self-Assembled Nanodot Fabrication by Using Diblock Copolymer

Contributors:

Huda, M. (author) / Yin, Y. (author) / Hosaka, S. (author) / Hanaizumi, O. / Unno, M.

Published in:

Silicon Science and Advanced Micro-Device Engineering I ; 120-123

KEY ENGINEERING MATERIALS ; 459

Publication date:

2011-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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