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    Chemical mechanical polishing and electrochemical characteristics of tungsten using mixed oxidizers with hydrogen peroxide and ferric nitrate

    New search for: Seo, Y. J.
    New search for: Kim, N. H.
    New search for: Lee, W. S.

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    Chemical mechanical polishing and electrochemical characteristics of tungsten using mixed oxidizers with hydrogen peroxide and ferric nitrate

    New search for: Seo, Y. J.
    New search for: Kim, N. H.
    New search for: Lee, W. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical mechanical polishing and electrochemical characteristics of tungsten using mixed oxidizers with hydrogen peroxide and ferric nitrate

    New search for: Seo, Y. J.
    New search for: Kim, N. H.
    New search for: Lee, W. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Chemical mechanical polishing and electrochemical characteristics of tungsten using mixed oxidizers with hydrogen peroxide and ferric nitrate

    Contributors:

    Seo, Y. J. (author) / Kim, N. H. (author) / Lee, W. S. (author)

    Published in:

    MATERIALS LETTERS ; 60 ; 1192-1197

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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