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Raman Microspectroscopy Study on the Ground Surface of Monocrystalline Silicon Wafers

Zhang, Y. X. / Kang, R. K. / Guo, D. M. / Jin, Z. J.

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Raman Microspectroscopy Study on the Ground Surface of Monocrystalline Silicon Wafers

Zhang, Y. X. / Kang, R. K. / Guo, D. M. / Jin, Z. J.

Raman Microspectroscopy Study on the Ground Surface of Monocrystalline Silicon Wafers

Zhang, Y. X. / Kang, R. K. / Guo, D. M. / Jin, Z. J.

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Check availability in my library

Order at Subito €

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Document information

Title:

Raman Microspectroscopy Study on the Ground Surface of Monocrystalline Silicon Wafers

Contributors:

Zhang, Y. X. (author) / Kang, R. K. (author) / Guo, D. M. (author) / Jin, Z. J. (author)

Published in:

KEY ENGINEERING MATERIALS ; 304/305 ; 241-245

Publication date:

2006-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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