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Sub-100nm Hybrid Stamp Fabrication by Hot Embossing
Sub-100nm Hybrid Stamp Fabrication by Hot Embossing
Sub-100nm Hybrid Stamp Fabrication by Hot Embossing
Hong, S. H. (author) / Yang, K. Y. (author) / Lee, H. (author) / Kim, H. S. / Li, Y. B. / Lee, S. W.
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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