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    Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering

    New search for: Yuan, X. M.
    New search for: Yan, P. X.
    New search for: Liu, J. Z.

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    Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering

    New search for: Yuan, X. M.
    New search for: Yan, P. X.
    New search for: Liu, J. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering

    New search for: Yuan, X. M.
    New search for: Yan, P. X.
    New search for: Liu, J. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering

    Contributors:

    Yuan, X. M. (author) / Yan, P. X. (author) / Liu, J. Z. (author)

    Published in:

    MATERIALS LETTERS ; 60 ; 1809-1812

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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