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Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering

Liu, L. / Wang, Y. / Feng, K. / Li, Y. / Li, W. / Zhao, C. / Zhao, Y.

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Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering

Liu, L. / Wang, Y. / Feng, K. / Li, Y. / Li, W. / Zhao, C. / Zhao, Y.

Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering

Liu, L. / Wang, Y. / Feng, K. / Li, Y. / Li, W. / Zhao, C. / Zhao, Y.

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Check availability in my library

Order at Subito €

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Document information

Title:

Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering

Contributors:

Liu, L. (author) / Wang, Y. (author) / Feng, K. (author) / Li, Y. (author) / Li, W. (author) / Zhao, C. (author) / Zhao, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 4185-4189

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Yuan, X.M. / Li, H.J. / Wei, Y. et al. | British Library Conference Proceedings | 2012

Polycrystalline carbon nitride -C~3N~4 films synthesized by radio frequency magnetron sputtering

Li, Y.-A. / Xu, S. / Li, H.-S. et al. | British Library Online Contents | 1998

Preparation of High Quality Cubic Boron Nitride Film by Radio Frequency Magnetron Sputtering and Its Characterization

Cai, Z.-h. / Du, Y.-p. / Tan, J. et al. | British Library Online Contents | 2005

Comment on Lihua Liu et al. "Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering" [Appl. Surf. Sci. 252 (2006) 4185-4189]

Linss, V. | British Library Online Contents | 2007

Effects of experimental parameters on composition of boron carbon nitride thin films deposited by magnetron sputtering

Liu, L. / Zhao, Y. / Tao, Y. et al. | British Library Online Contents | 2006