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    Effects of experimental parameters on composition of boron carbon nitride thin films deposited by magnetron sputtering

    New search for: Liu, L.
    New search for: Zhao, Y.
    New search for: Tao, Y.
    New search for: Yang, D.
    New search for: Ma, H.
    New search for: Li, Y.

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    Effects of experimental parameters on composition of boron carbon nitride thin films deposited by magnetron sputtering

    New search for: Liu, L.
    New search for: Zhao, Y.
    New search for: Tao, Y.
    New search for: Yang, D.
    New search for: Ma, H.
    New search for: Li, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of experimental parameters on composition of boron carbon nitride thin films deposited by magnetron sputtering

    New search for: Liu, L.
    New search for: Zhao, Y.
    New search for: Tao, Y.
    New search for: Yang, D.
    New search for: Ma, H.
    New search for: Li, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effects of experimental parameters on composition of boron carbon nitride thin films deposited by magnetron sputtering

    Contributors:

    Liu, L. (author) / Zhao, Y. (author) / Tao, Y. (author) / Yang, D. (author) / Ma, H. (author) / Li, Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 439-443

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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