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Reduction of sidewall roughness in silicon-on-insulator rib waveguides

Gao, F. / Wang, Y. / Cao, G. / Jia, X. / Zhang, F.

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Reduction of sidewall roughness in silicon-on-insulator rib waveguides

Gao, F. / Wang, Y. / Cao, G. / Jia, X. / Zhang, F.

Reduction of sidewall roughness in silicon-on-insulator rib waveguides

Gao, F. / Wang, Y. / Cao, G. / Jia, X. / Zhang, F.

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Document information

Title:

Reduction of sidewall roughness in silicon-on-insulator rib waveguides

Contributors:

Gao, F. (author) / Wang, Y. (author) / Cao, G. (author) / Jia, X. (author) / Zhang, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 5071-5075

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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