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Laser micromachining of sputtered DLC films

Fu, Y. Q. / Luo, J. K. / Flewitt, A. J. / Ong, S. E. / Zhang, S. / Milne, W. I.

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Laser micromachining of sputtered DLC films

Fu, Y. Q. / Luo, J. K. / Flewitt, A. J. / Ong, S. E. / Zhang, S. / Milne, W. I.

Laser micromachining of sputtered DLC films

Fu, Y. Q. / Luo, J. K. / Flewitt, A. J. / Ong, S. E. / Zhang, S. / Milne, W. I.

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Check availability in my library

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Document information

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Document information

Title:

Laser micromachining of sputtered DLC films

Contributors:

Fu, Y. Q. (author) / Luo, J. K. (author) / Flewitt, A. J. (author) / Ong, S. E. (author) / Zhang, S. (author) / Milne, W. I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 4914-4918

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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