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Influence of nanocrystalline structure of surface on boron gettering from silicon

Gorelkinskii, Y. V. / Abdullin, K. A. / Mukashev, B. N. / Kalykova, G. K. / Serikkanov, A. S.

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Influence of nanocrystalline structure of surface on boron gettering from silicon

Gorelkinskii, Y. V. / Abdullin, K. A. / Mukashev, B. N. / Kalykova, G. K. / Serikkanov, A. S.

Influence of nanocrystalline structure of surface on boron gettering from silicon

Gorelkinskii, Y. V. / Abdullin, K. A. / Mukashev, B. N. / Kalykova, G. K. / Serikkanov, A. S.

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Document information

Title:

Influence of nanocrystalline structure of surface on boron gettering from silicon

Contributors:

Gorelkinskii, Y. V. (author) / Abdullin, K. A. (author) / Mukashev, B. N. (author) / Kalykova, G. K. (author) / Serikkanov, A. S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 26 ; 822-825

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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