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Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. / Haarahiltunen, A. / Talvitie, H. / Sinkkonen, J.

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Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. / Haarahiltunen, A. / Talvitie, H. / Sinkkonen, J.

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. / Haarahiltunen, A. / Talvitie, H. / Sinkkonen, J.

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Document information

Title:

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Contributors:

Asghar, M. I. (author) / Yli-Koski, M. (author) / Savin, H. (author) / Haarahiltunen, A. (author) / Talvitie, H. (author) / Sinkkonen, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 224-227

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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