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    Influence of rapid thermal annealing on morphological and electrical properties of RF sputtered AlN films

    New search for: Kar, J. P.
    New search for: Bose, G.
    New search for: Tuli, S.

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    Influence of rapid thermal annealing on morphological and electrical properties of RF sputtered AlN films

    New search for: Kar, J. P.
    New search for: Bose, G.
    New search for: Tuli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of rapid thermal annealing on morphological and electrical properties of RF sputtered AlN films

    New search for: Kar, J. P.
    New search for: Bose, G.
    New search for: Tuli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of rapid thermal annealing on morphological and electrical properties of RF sputtered AlN films

    Contributors:

    Kar, J. P. (author) / Bose, G. (author) / Tuli, S. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 8 ; 646-651

    Publication date:

    2005-01-01

    Size:

    6 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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