Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Electrical properties and annealing effects on the stress of RF-sputtered c-BN films

    New search for: Zhang, X. W.
    New search for: Zou, Y. J.
    New search for: Yan, H.
    New search for: Wang, B.
    New search for: Chen, G. H.
    New search for: Wong, S. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Electrical properties and annealing effects on the stress of RF-sputtered c-BN films

    New search for: Zhang, X. W.
    New search for: Zou, Y. J.
    New search for: Yan, H.
    New search for: Wang, B.
    New search for: Chen, G. H.
    New search for: Wong, S. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrical properties and annealing effects on the stress of RF-sputtered c-BN films

    New search for: Zhang, X. W.
    New search for: Zou, Y. J.
    New search for: Yan, H.
    New search for: Wang, B.
    New search for: Chen, G. H.
    New search for: Wong, S. P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrical properties and annealing effects on the stress of RF-sputtered c-BN films

    Contributors:

    Zhang, X. W. (author) / Zou, Y. J. (author) / Yan, H. (author) / Wang, B. (author) / Chen, G. H. (author) / Wong, S. P. (author)

    Published in:

    MATERIALS LETTERS ; 45 ; 111-115

    Publication date:

    2000-01-01

    Size:

    5 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Development of mechanical stress in sputtered Cr~3Si films during annealing

    Brueckner, W. / Weise, G. / Mattern, N. et al. | British Library Online Contents | 1996

    Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films

    Choi, W. K. / Chong, N. B. / Tan, L. S. et al. | British Library Online Contents | 2000

    Effect of annealing temperature on microstructure, optical and electrical properties of sputtered Ba0.9Sr0.1TiO3 thin films

    Quan, Z. / Hu, H. / Guo, S. et al. | British Library Online Contents | 2009

    Influence of rapid thermal annealing on morphological and electrical properties of RF sputtered AlN films

    Kar, J. P. / Bose, G. / Tuli, S. | British Library Online Contents | 2005

    Effect of annealing on electrical and optical properties of RF magnetron sputtered indium tin oxide films

    Wu, W.-F. / Chiou, B.-S. | British Library Online Contents | 1993

    Back to top