Influence of rapid-thermal-annealing temperature on properties of rf-sputtered SnOx thin films: Fid-Bau Portal

Influence of rapid-thermal-annealing temperature on properties of rf-sputtered SnOx thin films

Jiang, Y. H. / Chiu, I. C. / Kao, P. K. / He, J. C. / Wu, Y. H. / Yang, Y. J. / Hsu, C. C. / Cheng, I. C. / Chen, J. Z.

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Influence of rapid-thermal-annealing temperature on properties of rf-sputtered SnOx thin films

Jiang, Y. H. / Chiu, I. C. / Kao, P. K. / He, J. C. / Wu, Y. H. / Yang, Y. J. / Hsu, C. C. / Cheng, I. C. / Chen, J. Z.

Influence of rapid-thermal-annealing temperature on properties of rf-sputtered SnOx thin films

Jiang, Y. H. / Chiu, I. C. / Kao, P. K. / He, J. C. / Wu, Y. H. / Yang, Y. J. / Hsu, C. C. / Cheng, I. C. / Chen, J. Z.

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Document information

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Document information

Title:

Influence of rapid-thermal-annealing temperature on properties of rf-sputtered SnOx thin films

Contributors:

Jiang, Y. H. (author) / Chiu, I. C. (author) / Kao, P. K. (author) / He, J. C. (author) / Wu, Y. H. (author) / Yang, Y. J. (author) / Hsu, C. C. (author) / Cheng, I. C. (author) / Chen, J. Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 327 ; 358-363

Publication date:

2015-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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