Study the effects of nitrogen annealing on oxygen precipitation in fast neutron-irradiated Czochralski silicon: Fid-Bau Portal

Study the effects of nitrogen annealing on oxygen precipitation in fast neutron-irradiated Czochralski silicon

Lili, L. / Guifeng, C. / Yangxian, L. / Ma, Q. / Yong, S. / Shuai, Y. / Shuwen, Z.

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Study the effects of nitrogen annealing on oxygen precipitation in fast neutron-irradiated Czochralski silicon

Lili, L. / Guifeng, C. / Yangxian, L. / Ma, Q. / Yong, S. / Shuai, Y. / Shuwen, Z.

Study the effects of nitrogen annealing on oxygen precipitation in fast neutron-irradiated Czochralski silicon

Lili, L. / Guifeng, C. / Yangxian, L. / Ma, Q. / Yong, S. / Shuai, Y. / Shuwen, Z.

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Document information

Title:

Study the effects of nitrogen annealing on oxygen precipitation in fast neutron-irradiated Czochralski silicon

Contributors:

Lili, L. (author) / Guifeng, C. (author) / Yangxian, L. (author) / Ma, Q. (author) / Yong, S. (author) / Shuai, Y. (author) / Shuwen, Z. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 107-109

Publication date:

2006-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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