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    Iron precipitation in as-received Czochralski silicon during low temperature annealing

    New search for: Zeng, Y.
    New search for: Yang, D.
    New search for: Xi, Z.
    New search for: Wang, W.
    New search for: Que, D.

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    Iron precipitation in as-received Czochralski silicon during low temperature annealing

    New search for: Zeng, Y.
    New search for: Yang, D.
    New search for: Xi, Z.
    New search for: Wang, W.
    New search for: Que, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Iron precipitation in as-received Czochralski silicon during low temperature annealing

    New search for: Zeng, Y.
    New search for: Yang, D.
    New search for: Xi, Z.
    New search for: Wang, W.
    New search for: Que, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Iron precipitation in as-received Czochralski silicon during low temperature annealing

    Contributors:

    Zeng, Y. (author) / Yang, D. (author) / Xi, Z. (author) / Wang, W. (author) / Que, D. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 12 ; 185-188

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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