Germanium-doped Czochralski silicon: Oxygen precipitates and their annealing behavior: Fid-Bau Portal

Germanium-doped Czochralski silicon: Oxygen precipitates and their annealing behavior

Chen, J. / Yang, D. / Li, H. / Ma, X. / Que, D.

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Germanium-doped Czochralski silicon: Oxygen precipitates and their annealing behavior

Chen, J. / Yang, D. / Li, H. / Ma, X. / Que, D.

Germanium-doped Czochralski silicon: Oxygen precipitates and their annealing behavior

Chen, J. / Yang, D. / Li, H. / Ma, X. / Que, D.

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Order at Subito €

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Document information

Title:

Germanium-doped Czochralski silicon: Oxygen precipitates and their annealing behavior

Contributors:

Chen, J. (author) / Yang, D. (author) / Li, H. (author) / Ma, X. (author) / Que, D. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 600-605

Publication date:

2006-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Bazzali, A. / Borionetti, G. / Falster, R. et al. | British Library Online Contents | 2001

Photoluminescence of Ring-Distribution of Oxygen Precipitates in Czochralski Silicon

Terashima, K. / Ikarashi, T. / Ono, H. et al. | British Library Online Contents | 1995

Morphology of Oxide Precipitates in Czochralski Silicon Crystals

Sueoka, K. / Ikeda, N. / Yamamoto, T. et al. | British Library Online Contents | 1993

Precipitates caused by prolonged high-temperature annealing in floating zone silicon wafer grown from Czochralski single-crystal rod

Nakazawa, H. / Ogino, M. / Teranishi, H. et al. | British Library Online Contents | 2013

Annealing of Electron Irradiated P-, As-, Sb- and Bi-Doped Czochralski Silicon

Hallberg, T. / Lindstroem, J. L. / Svensson, B. G. et al. | British Library Online Contents | 1994