HRTEM observation on microstructures in the Ge-implanted silicon wafers re-processed by solid phase epitaxy: Fid-Bau Portal

HRTEM observation on microstructures in the Ge-implanted silicon wafers re-processed by solid phase epitaxy

Xiao, Q. / Tu, H. / Zhou, Q. / Chang, Q. / Zhang, G. / Wang, J. / Ma, T.

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HRTEM observation on microstructures in the Ge-implanted silicon wafers re-processed by solid phase epitaxy

Xiao, Q. / Tu, H. / Zhou, Q. / Chang, Q. / Zhang, G. / Wang, J. / Ma, T.

HRTEM observation on microstructures in the Ge-implanted silicon wafers re-processed by solid phase epitaxy

Xiao, Q. / Tu, H. / Zhou, Q. / Chang, Q. / Zhang, G. / Wang, J. / Ma, T.

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Access via TIB

Check availability in my library

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Document information

Title:

HRTEM observation on microstructures in the Ge-implanted silicon wafers re-processed by solid phase epitaxy

Contributors:

Xiao, Q. (author) / Tu, H. (author) / Zhou, Q. (author) / Chang, Q. (author) / Zhang, G. (author) / Wang, J. (author) / Ma, T. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 121-126

Publication date:

2006-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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