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Silicon Atomic Layer Deposition on Nanocrystalline Diamond

Wang, Y. H. / Lu, J. / Qi, X. H. / Zang, J. B.

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Silicon Atomic Layer Deposition on Nanocrystalline Diamond

Wang, Y. H. / Lu, J. / Qi, X. H. / Zang, J. B.

Silicon Atomic Layer Deposition on Nanocrystalline Diamond

Wang, Y. H. / Lu, J. / Qi, X. H. / Zang, J. B.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Silicon Atomic Layer Deposition on Nanocrystalline Diamond

Contributors:

Wang, Y. H. (author) / Lu, J. (author) / Qi, X. H. (author) / Zang, J. B. (author) / Yuan, Z. / Xu, X. / Zuo, D. / Yuan, J. / Yao, Y.

Published in:

Advances in Machining & Manufacturing Technology VIII ; 436-439

KEY ENGINEERING MATERIALS ; 315/316

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Zang, J. B. / Lu, J. / Wang, Y. H. et al. | British Library Online Contents | 2006

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Micron diamond composites with nanocrystalline silicon carbide bonding

Qian, J. / Zerda, T. W. / He, D. et al. | British Library Online Contents | 2003

Protective silicon coating for nanodiamonds using atomic layer deposition

Lu, J. / Wang, Y. H. / Zang, J. B. et al. | British Library Online Contents | 2007

Hafnium silicon oxide films prepared by atomic layer deposition

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