Hybrid-excitation chemical vapor deposition of a silicon nitride film

Yamamoto, S. / Migitaka, M. | British Library Online Contents | 1994

Atomic-layer chemical-vapor-deposition of silicon dioxide films with an extremely low hydrogen content

Yamaguchi, K.-I. / Imai, S. / Ishitobi, N. et al. | British Library Online Contents | 1998

Chemical vapor deposition of silicon nitride thin films from tris(diethylamino)chlorosilane

Liu, X. / Pu, X. / Li, H. et al. | British Library Online Contents | 2005

Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces

Yokoyama, S. / Ikeda, N. / Kajikawa, K. et al. | British Library Online Contents | 1998

The optical properties of silicon-rich silicon nitride prepared by plasma-enhanced chemical vapor deposition

Yoshinaga, Seiya / Ishikawa, Yasuaki / Kawamura, Yusuke et al. | British Library Online Contents | 2019