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Nanometer Positioning System Based on Ball Screw
Nanometer Positioning System Based on Ball Screw
Nanometer Positioning System Based on Ball Screw
Lu, L. H. (author) / Liang, Y. C. (author) / Tachikawa, H. (author) / Guo, Y. F. (author) / Shimokohbe, A. (author) / Yuan, Z. / Xu, X. / Zuo, D. / Yuan, J. / Yao, Y.
2006-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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