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    Ion Beam Assisted Deposition of TiN Thin Films on Si Substrate

    New search for: Milinovic, V.
    New search for: Milosavljevic, M.
    New search for: Popovic, M.
    New search for: Novakovic, M.
    New search for: Perusko, D.
    New search for: Radovic, I.
    New search for: Bibic, N.
    New search for: Uskokovic, D. P.
    New search for: Milonjic, S. K.
    New search for: Rakovic, D. I.

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    Ion Beam Assisted Deposition of TiN Thin Films on Si Substrate

    New search for: Milinovic, V.
    New search for: Milosavljevic, M.
    New search for: Popovic, M.
    New search for: Novakovic, M.
    New search for: Perusko, D.
    New search for: Radovic, I.
    New search for: Bibic, N.
    New search for: Uskokovic, D. P.
    New search for: Milonjic, S. K.
    New search for: Rakovic, D. I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ion Beam Assisted Deposition of TiN Thin Films on Si Substrate

    New search for: Milinovic, V.
    New search for: Milosavljevic, M.
    New search for: Popovic, M.
    New search for: Novakovic, M.
    New search for: Perusko, D.
    New search for: Radovic, I.
    New search for: Bibic, N.
    New search for: Uskokovic, D. P.
    New search for: Milonjic, S. K.
    New search for: Rakovic, D. I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Ion Beam Assisted Deposition of TiN Thin Films on Si Substrate

    Contributors:

    Milinovic, V. (author) / Milosavljevic, M. (author) / Popovic, M. (author) / Novakovic, M. (author) / Perusko, D. (author) / Radovic, I. (author) / Bibic, N. (author) / Uskokovic, D. P. / Milonjic, S. K. / Rakovic, D. I.

    Published in:

    Recent Developments in Advanced Materials and Processes ; 155-160

    MATERIALS SCIENCE FORUM ; 518

    Publication date:

    2006-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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