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Oxidation of TiN thin films in an ion-beam-assisted deposition process
Oxidation of TiN thin films in an ion-beam-assisted deposition process
Oxidation of TiN thin films in an ion-beam-assisted deposition process
Kubota, H. (author) / Nagata, M. (author) / Miyagawa, R. (author) / Nicolet, M. A. (author)
APPLIED SURFACE SCIENCE ; 82/83 ; 565
1994-01-01
565 pages
Article (Journal)
Unknown
DDC:
621.35
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