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Nanomechanical characterization of amorphous hydrogenated carbon thin films

Fang, T. H. / Chang, W. J.

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Nanomechanical characterization of amorphous hydrogenated carbon thin films

Fang, T. H. / Chang, W. J.

Nanomechanical characterization of amorphous hydrogenated carbon thin films

Fang, T. H. / Chang, W. J.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nanomechanical characterization of amorphous hydrogenated carbon thin films

Contributors:

Fang, T. H. (author) / Chang, W. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 6243-6248

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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