Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Characterization of hydrogenated amorphous carbon thin films by end-Hall ion beam deposition

    New search for: Tang, Y.
    New search for: Li, Y. S.
    New search for: Yang, Q.
    New search for: Hirose, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Characterization of hydrogenated amorphous carbon thin films by end-Hall ion beam deposition

    New search for: Tang, Y.
    New search for: Li, Y. S.
    New search for: Yang, Q.
    New search for: Hirose, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of hydrogenated amorphous carbon thin films by end-Hall ion beam deposition

    New search for: Tang, Y.
    New search for: Li, Y. S.
    New search for: Yang, Q.
    New search for: Hirose, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of hydrogenated amorphous carbon thin films by end-Hall ion beam deposition

    Contributors:

    Tang, Y. (author) / Li, Y. S. (author) / Yang, Q. (author) / Hirose, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 4699-4705

    Publication date:

    2011-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Nanomechanical characterization of amorphous hydrogenated carbon thin films

    Fang, T. H. / Chang, W. J. | British Library Online Contents | 2006

    Plasmochemical deposition of amorphous hydrogenated silicon films

    Bosyakov, M. N. / Grunskii, D. I. / Dostanko, A. P. | British Library Online Contents | 1999

    Deposition of hydrogenated amorphous carbon nitride films by dielectric barrier discharge plasmas

    Niu, J. / Zhang, L. / Zhang, Z. et al. | British Library Online Contents | 2010

    Deposition of hydrogenated amorphous silicon-carbon films by vacuum ultraviolet photo-CVD

    Fujii, T. / Yoshimoto, M. / Fuyuki, T. et al. | British Library Online Contents | 1994

    Comparing hardness and wear data for tetrahedral amorphous carbon and hydrogenated amorphous carbon thin films

    Lemoine, P. / Quinn, J. P. / Maguire, P. et al. | British Library Online Contents | 2004

    Back to top