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    Investigation on hexamethyldisilazane vapor treatment of plasma-damaged nanoporous organosilicate films

    New search for: Rajagopalan, T.
    New search for: Lahlouh, B.
    New search for: Lubguban, J. A.
    New search for: Biswas, N.
    New search for: Gangopadhyay, S.
    New search for: Sun, J.
    New search for: Huang, D. H.
    New search for: Simon, S. L.
    New search for: Toma, D.
    New search for: Butler, R.

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    Investigation on hexamethyldisilazane vapor treatment of plasma-damaged nanoporous organosilicate films

    New search for: Rajagopalan, T.
    New search for: Lahlouh, B.
    New search for: Lubguban, J. A.
    New search for: Biswas, N.
    New search for: Gangopadhyay, S.
    New search for: Sun, J.
    New search for: Huang, D. H.
    New search for: Simon, S. L.
    New search for: Toma, D.
    New search for: Butler, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Investigation on hexamethyldisilazane vapor treatment of plasma-damaged nanoporous organosilicate films

    New search for: Rajagopalan, T.
    New search for: Lahlouh, B.
    New search for: Lubguban, J. A.
    New search for: Biswas, N.
    New search for: Gangopadhyay, S.
    New search for: Sun, J.
    New search for: Huang, D. H.
    New search for: Simon, S. L.
    New search for: Toma, D.
    New search for: Butler, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Investigation on hexamethyldisilazane vapor treatment of plasma-damaged nanoporous organosilicate films

    Contributors:

    Rajagopalan, T. (author) / Lahlouh, B. (author) / Lubguban, J. A. (author) / Biswas, N. (author) / Gangopadhyay, S. (author) / Sun, J. (author) / Huang, D. H. (author) / Simon, S. L. (author) / Toma, D. (author) / Butler, R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 252 ; 6323-6331

    Publication date:

    2006-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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