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An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology
An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology
An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology
Won, J. (author) / Choa, S.-H. (author) / Yulong, Z. (author)
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 20 ; 505-512
2006-01-01
8 pages
Article (Journal)
English
DDC:
621
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