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A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology
A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology
A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology
Zhao, L.B. (author) / Fang, X.D. (author) / Zhao, Y.L. (author) / Jiang, Z.D. (author) / Li, Y. (author)
KEY ENGINEERING MATERIALS ; 483 ; 206-211
2011-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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