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Electron tomography of microelectronic device interconnects

Yang, Q. / Mardinly, J. / Kubel, C. / Nelson, C. / Kisielowski, C.

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Electron tomography of microelectronic device interconnects

Yang, Q. / Mardinly, J. / Kubel, C. / Nelson, C. / Kisielowski, C.

Electron tomography of microelectronic device interconnects

Yang, Q. / Mardinly, J. / Kubel, C. / Nelson, C. / Kisielowski, C.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Electron tomography of microelectronic device interconnects

Contributors:

Yang, Q. (author) / Mardinly, J. (author) / Kubel, C. (author) / Nelson, C. (author) / Kisielowski, C. (author)

Published in:

INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 97 ; 880-884

Publication date:

2006-01-01

Size:

5 pages

ISSN:

1862-5282

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 669.9

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