Characterization of interfaces in nanoscale semiconductor devices by optimization of depth resolution in SIMS depth profiling

Chakraborty, B. R. | British Library Online Contents | 2004

XPS depth profiling of powdered materials

Shimada, H. / Sato, K. / Matsubayashi, N. et al. | British Library Online Contents | 1999

O~2^+ versus Cs^+ for high depth resolution depth profiling of III-V nitride-based semiconductor devices

Kachan, M. / Hunter, J. / Kouzminov, D. et al. | British Library Online Contents | 2004

Ultralow-energy SIMS for shallow semiconductor depth profiling

Chanbasha, A. R. / Wee, A. T. | British Library Online Contents | 2008

Shave-off depth profiling: Depth profiling with an absolute depth scale

Nojima, M. / Maekawa, A. / Yamamoto, T. et al. | British Library Online Contents | 2006