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The influence of impurity profile on ultra-shallow GaAs sidewall tunnel junction characteristics
The influence of impurity profile on ultra-shallow GaAs sidewall tunnel junction characteristics
The influence of impurity profile on ultra-shallow GaAs sidewall tunnel junction characteristics
Ohno, T. (author) / Oyama, Y. (author) / Nishizawa, J. i. (author)
APPLIED SURFACE SCIENCE ; 252 ; 7283-7285
2006-01-01
3 pages
Article (Journal)
English
DDC:
621.35
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