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Secondary ion measurements for oxygen cluster ion SIMS

Ninomiya, S. / Aoki, T. / Seki, T. / Matsuo, J.

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Secondary ion measurements for oxygen cluster ion SIMS

Ninomiya, S. / Aoki, T. / Seki, T. / Matsuo, J.

Secondary ion measurements for oxygen cluster ion SIMS

Ninomiya, S. / Aoki, T. / Seki, T. / Matsuo, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Similar titles

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Document information

Title:

Secondary ion measurements for oxygen cluster ion SIMS

Contributors:

Ninomiya, S. (author) / Aoki, T. (author) / Seki, T. (author) / Matsuo, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7290-7292

Publication date:

2006-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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