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Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics

Vervaet, A. / Siau, S. / De Baets, J. / Manirambona, B.

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Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics

Vervaet, A. / Siau, S. / De Baets, J. / Manirambona, B.

Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics

Vervaet, A. / Siau, S. / De Baets, J. / Manirambona, B.

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Order at Subito €

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Document information

Title:

Optimization of microvia-technology using excimer laser for build-up layer application in microelectronics

Contributors:

Vervaet, A. (author) / Siau, S. (author) / De Baets, J. (author) / Manirambona, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 8243-8250

Publication date:

2006-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Manirambona, B. / De Baets, J. / Vervaet, A. | British Library Online Contents | 2003

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Microvia Formation with High Repetition-Rate CO~2 Lasers

Dunsky, C. / Matsumoto, H. / IPC | British Library Conference Proceedings | 2001

Excimer Laser Etching

Boatner, L. / Longmire, H. / Rouleau, C. et al. | British Library Online Contents | 2008