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    Excimer laser induced chlorine etching of Si patterns for microelectronics

    New search for: Baumgaertner, H.
    New search for: Jiang, W.
    New search for: Eisele, I.

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    Excimer laser induced chlorine etching of Si patterns for microelectronics

    New search for: Baumgaertner, H.
    New search for: Jiang, W.
    New search for: Eisele, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Excimer laser induced chlorine etching of Si patterns for microelectronics

    New search for: Baumgaertner, H.
    New search for: Jiang, W.
    New search for: Eisele, I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Excimer laser induced chlorine etching of Si patterns for microelectronics

    Contributors:

    Baumgaertner, H. (author) / Jiang, W. (author) / Eisele, I. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 106 ; 301-305

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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