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Surface free energy of CrNx films deposited using closed field unbalanced magnetron sputtering

Sun, C. C. / Lee, S. C. / Dai, S. B. / Fu, Y. S. / Wang, Y. C. / Lee, Y. H.

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Surface free energy of CrNx films deposited using closed field unbalanced magnetron sputtering

Sun, C. C. / Lee, S. C. / Dai, S. B. / Fu, Y. S. / Wang, Y. C. / Lee, Y. H.

Surface free energy of CrNx films deposited using closed field unbalanced magnetron sputtering

Sun, C. C. / Lee, S. C. / Dai, S. B. / Fu, Y. S. / Wang, Y. C. / Lee, Y. H.

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Check availability in my library

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Document information

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Document information

Title:

Surface free energy of CrNx films deposited using closed field unbalanced magnetron sputtering

Contributors:

Sun, C. C. (author) / Lee, S. C. (author) / Dai, S. B. (author) / Fu, Y. S. (author) / Wang, Y. C. (author) / Lee, Y. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 8295-8300

Publication date:

2006-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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