Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films: Fid-Bau Portal

Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

Lin, J.L. / Mishra, B. / Pinkas, M. / Moore, J.J.

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Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

Lin, J.L. / Mishra, B. / Pinkas, M. / Moore, J.J.

Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

Lin, J.L. / Mishra, B. / Pinkas, M. / Moore, J.J.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS) Deposited TiC/a:C Thin Films

Contributors:

Lin, J.L. (author) / Mishra, B. (author) / Pinkas, M. (author) / Moore, J.J. (author) / Chang, Y.W. / Kim, N.J. / Lee, C.S.

Published in:

PRICM 6: Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea ; 1177-1180

MATERIALS SCIENCE FORUM ; 561/565

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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