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    Carbon nitride based hard multilayer films prepared by closed field unbalanced magnetron sputtering

    New search for: Vyas, A.
    New search for: Li, L. K. Y.
    New search for: Zhou, Z. F.
    New search for: Shen, Y. G.

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    Carbon nitride based hard multilayer films prepared by closed field unbalanced magnetron sputtering

    New search for: Vyas, A.
    New search for: Li, L. K. Y.
    New search for: Zhou, Z. F.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Carbon nitride based hard multilayer films prepared by closed field unbalanced magnetron sputtering

    New search for: Vyas, A.
    New search for: Li, L. K. Y.
    New search for: Zhou, Z. F.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Carbon nitride based hard multilayer films prepared by closed field unbalanced magnetron sputtering

    Contributors:

    Vyas, A. (author) / Li, L. K. Y. (author) / Zhou, Z. F. (author) / Shen, Y. G. (author)

    Published in:

    SURFACE ENGINEERING -LONDON- ; 22 ; 15-25

    Publication date:

    2006-01-01

    Size:

    11 pages

    ISSN:

    0267-0844

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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