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Optical properties of In2O3 oxidized from InN deposited by reactive magnetron sputtering

Chen, L. C. / Lan, W. H. / Lin, R. M. / Shen, H. T. / Chen, H. C.

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Optical properties of In2O3 oxidized from InN deposited by reactive magnetron sputtering

Chen, L. C. / Lan, W. H. / Lin, R. M. / Shen, H. T. / Chen, H. C.

Optical properties of In2O3 oxidized from InN deposited by reactive magnetron sputtering

Chen, L. C. / Lan, W. H. / Lin, R. M. / Shen, H. T. / Chen, H. C.

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Document information

Title:

Optical properties of In2O3 oxidized from InN deposited by reactive magnetron sputtering

Contributors:

Chen, L. C. (author) / Lan, W. H. (author) / Lin, R. M. (author) / Shen, H. T. (author) / Chen, H. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 8438-8441

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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